Lab in charge:
- Faculty: Prof. Titto Anujan
Details of Labs conducted:
- 01EC6793 – DEVICE MODELING AND PROCESS SIMULATION LAB – M1 MNE
- 01EC6794 – MEMS LAB – M2 MNE
01EC6794 – MEMS LAB
This course aims to:
- Familiarising Various MEMS software.
- Simulation of MEMS structure.
LIST OF EXPERIMENTS:
1 Simulation of cantilever.
2 Simulation of micro machined structures
3 Simulation of accelerometers
4 Simulation of micromirror.
5 Simulation MEMS structures using sacrificial layer method.
6 Simulation of MEMS sensors.
7 Simulation study of integration of circuits and MEMS.
01EC6793 – DEVICE MODELING AND PROCESS SIMULATION LAB
This course aims to:
- Familiarising process and device simulation softwares
- Familiarising device modelling.
LIST OF EXPERIMENTS:
1 Simulation of process steps for PN junction diode and study of device performance.
2 Study process steps in CMOS .
3 Study the Effects of different process methods of Gate oxide formation and its effects in device
4 Study the Effects of annealing temperature variation process and its effects in device
5 Circuit simulation using device simulator.
6 Simulation of high K -MOSFET.
7 Device model generation using LUT method
8 Application of PWM IC TL 494
9 BSIM parameter extraction from simulated device.