MEMS Lab

Lab in charge:

  • Faculty: Prof. Titto Anujan

Details of Labs conducted: 

  • 01EC6793 – DEVICE MODELING AND PROCESS SIMULATION LAB – M1 MNE
  • 01EC6794 – MEMS LAB – M2 MNE

01EC6794 – MEMS LAB

This course aims to:

  • Familiarising Various MEMS software.
  • Simulation of MEMS structure.

LIST OF EXPERIMENTS:

1 Simulation of cantilever.
2 Simulation of micro machined structures
3 Simulation of accelerometers
4 Simulation of micromirror.
5 Simulation MEMS structures using sacrificial layer method.
6 Simulation of MEMS sensors.
7 Simulation study of integration of circuits and MEMS.

01EC6793 – DEVICE MODELING AND PROCESS SIMULATION LAB

This course aims to:

  • Familiarising process and device simulation softwares
  • Familiarising device modelling.

LIST OF EXPERIMENTS:

1 Simulation of process steps for PN junction diode and study of device performance.
2 Study process steps in CMOS .
3 Study the Effects of different process methods of Gate oxide formation and its effects in device
4 Study the Effects of annealing temperature variation process and its effects in device
5 Circuit simulation using device simulator.
6 Simulation of high K -MOSFET.
7 Device model generation using LUT method
8 Application of PWM IC TL 494
9 BSIM parameter extraction from simulated device.